Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823897 | Method for forming insulating film, apparatus for processing substrate, and system for processing substrate | Makoto Muramatsu | 2023-11-21 |
| 11631581 | Insulating film forming method, insulating film forming device, and substrate processing system | Makoto Muramatsu, Yusuke Saito, Hiroyuki Fujii | 2023-04-18 |
| 11574812 | Computer storage medium to perform a substrate treatment method using a block copolymer containing a hydrophilic and hydrophobic copolymers | Makoto Muramatsu, Tadatoshi Tomita, Gen You, Takahiro Kitano | 2023-02-07 |
| 11315784 | Method for forming insulating film, apparatus for processing substrate, and system for processing substrate | Makoto Muramatsu | 2022-04-26 |
| 10586711 | Substrate processing method and computer storage medium | Makoto Muramatsu, Tadatoshi Tomita, Takahiro Kitano | 2020-03-10 |
| 10418242 | Substrate treatment method using a block copolymer containing a hydrophilic and a hydrophobic polymers | Makoto Muramatsu, Tadatoshi Tomita, Gen You, Takahiro Kitano | 2019-09-17 |
| 10329144 | Substrate treatment method, computer storage medium and substrate treatment system | Makoto Muramatsu, Tadatoshi Tomita, Gen You, Takahiro Kitano, Takanori Nishi | 2019-06-25 |
| 9418860 | Use of topography to direct assembly of block copolymers in grapho-epitaxial applications | Mark H. Somervell, Makoto Muramatsu, Benjamen M. Rathsack, Tadatoshi Tomita, Hidetami Yaegashi +1 more | 2016-08-16 |