Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12283489 | Etching method and etching apparatus | Satoshi TODA, Naoki Shindo, Mitsuhiro Tachibana, Haruna Suzuki | 2025-04-22 |
| 12272541 | Etching method and etching apparatus | Naoki Shindo, Haruna Suzuki | 2025-04-08 |
| 11764070 | Etching method and etching apparatus | Satoshi TODA, Naoki Shindo, Haruna Suzuki | 2023-09-19 |
| 11574812 | Computer storage medium to perform a substrate treatment method using a block copolymer containing a hydrophilic and hydrophobic copolymers | Makoto Muramatsu, Tadatoshi Tomita, Hisashi Genjima, Takahiro Kitano | 2023-02-07 |
| 10418242 | Substrate treatment method using a block copolymer containing a hydrophilic and a hydrophobic polymers | Makoto Muramatsu, Tadatoshi Tomita, Hisashi Genjima, Takahiro Kitano | 2019-09-17 |
| 10329144 | Substrate treatment method, computer storage medium and substrate treatment system | Makoto Muramatsu, Tadatoshi Tomita, Hisashi Genjima, Takahiro Kitano, Takanori Nishi | 2019-06-25 |
| 10207349 | High-pressure container, substrate processing apparatus, and method for manufacturing high-pressure container | Kazuyuki Mitsuoka, Hiroki Ohno, Takehiko Orii, Takayuki Toshima, Hiroaki Inadomi | 2019-02-19 |
| 10199240 | Substrate processing method, substrate processing apparatus, and storage medium | Hidekazu Hayashi, Yohei Sato, Hisashi Okuchi, Hiroshi Tomita, Kazuyuki Mitsuoka +4 more | 2019-02-05 |
| 10096462 | Substrate processing method and storage medium | Hidekazu Hayashi, Yohei Sato, Hisashi Okuchi, Hiroshi Tomita, Kazuyuki Mitsuoka +3 more | 2018-10-09 |
| 10046370 | Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium | Gentaro Goshi, Kazuyuki Mitsuoka, Hiroki Ohno, Takehiko Orii, Takayuki Toshima | 2018-08-14 |
| 9911621 | Method for processing target object | Toshikatsu TOBANA, Soichiro Okada | 2018-03-06 |
| 9741583 | Substrate treatment method, computer readable storage medium and substrate treatment system | Makoto Muramatsu, Takahiro Kitano, Tadatoshi Tomita, Takanori Nishi | 2017-08-22 |
| 9662685 | Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium | Gentaro Goshi, Kazuyuki Mitsuoka, Hiroki Ohno, Takehiko Orii, Takayuki Toshima | 2017-05-30 |
| 9583330 | Supercritical drying method for semiconductor substrate and supercritical drying apparatus | Linan Ji, Hidekazu Hayashi, Hiroshi Tomita, Hisashi Okuchi, Yohei Sato +5 more | 2017-02-28 |
| 8771429 | Supercritical drying method for semiconductor substrate and supercritical drying apparatus | Linan Ji, Hidekazu Hayashi, Hiroshi Tomita, Hisashi Okuchi, Yohei Sato +5 more | 2014-07-08 |
| 8372212 | Supercritical drying method and apparatus for semiconductor substrates | Yohei Sato, Hisashi Okuchi, Hiroshi Tomita, Hidekazu Hayashi, Yukiko Kitajima +5 more | 2013-02-12 |
| 8084372 | Substrate processing method and computer storage medium | Makoto Muramatsu, Hiroyuki Fujii, Shouichi Terada, Takanori Nishi | 2011-12-27 |