Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12197129 | Substrate treatment method and substrate treatment system | Satoru Shimura, Masashi Enomoto, Hidetami Yaegashi | 2025-01-14 |
| 11205571 | Mask forming method | Hidetami Yaegashi | 2021-12-21 |
| 9911621 | Method for processing target object | Toshikatsu TOBANA, Gen You | 2018-03-06 |
| 9748101 | Substrate treatment method, computer storage medium, and substrate treatment system | Makoto Muramatsu, Takahiro Kitano, Tadatoshi Tomita, Keiji Tanouchi | 2017-08-29 |
| 9165797 | Liquid processing apparatus, liquid processing method, and storage medium | Kousuke Yoshihara, Yuichi Yoshida | 2015-10-20 |