Issued Patents All Time
Showing 1–25 of 95 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11720026 | Developing treatment method, computer storage medium and developing treatment apparatus | Akiko Kai, Kouichirou Tanaka, Hiroshi Ichinomiya | 2023-08-08 |
| 11476136 | Substrate processing apparatus and method of adjusting substrate processing apparatus | Kenichi Shigetomi, Takeshi Saikusa, Eiichi Sekimoto, Takayuki Fukudome, Suguru Enokida +2 more | 2022-10-18 |
| 11465168 | Liquid processing device and liquid processing method | Hiroyuki Ide, Hideo Shite | 2022-10-11 |
| 11342198 | Processing liquid supplying apparatus and processing liquid supplying method | Yuichi Terashita, Koji Takayanagi, Toshinobu Furusho, Takashi Sasa | 2022-05-24 |
| 11235350 | Solution treatment apparatus and cleaning method for solution treatment apparatus | Satoshi Shimmura, Yuji Sakai | 2022-02-01 |
| 11141758 | Film forming method, storage medium, and film forming system | Kentaro Yoshihara, Yuichi Yoshida, Naoki Shibata | 2021-10-12 |
| 10734251 | Liquid processing apparatus, liquid processing method, and storage medium for liquid process | Koji Takayanagi, Yukie Minekawa, Yuichi Yoshida, Yuichi Terashita, Toshinobu Furusho +1 more | 2020-08-04 |
| 10672606 | Coating film forming method, coating film forming apparatus, and storage medium | Takafumi Niwa | 2020-06-02 |
| 10504757 | Substrate processing apparatus and method of adjusting substrate processing apparatus | Kenichi Shigetomi, Takeshi Saikusa, Eiichi Sekimoto, Takayuki Fukudome, Suguru Enokida +2 more | 2019-12-10 |
| 10289004 | Developing apparatus, developing method and storage medium | Hideharu Kyouda, Koshi MUTA, Taro Yamamoto, Yasushi Takiguchi | 2019-05-14 |
| 10268116 | Processing liquid supplying apparatus and method of supplying processing liquid | Koji Takayanagi, Toshinobu Furusho, Takashi Sasa, Daisuke Ishimaru | 2019-04-23 |
| 10262880 | Cover plate for wind mark control in spin coating process | Derek Bassett, Wallace P. Printz, Joshua Hooge, Katsunori Ichino, Yuichi Terashita | 2019-04-16 |
| 10120285 | Developing method, developing apparatus and storage medium | Hideharu Kyouda, Koshi MUTA, Taro Yamamoto, Yasushi Takiguchi, Masahiro Fukuda | 2018-11-06 |
| 10101669 | Exposure apparatus, resist pattern forming method, and storage medium | Seiji Nagahara, Gousuke Shiraishi, Satoru Shimura, Shinichiro KAWAKAMI, Masaru Tomono +2 more | 2018-10-16 |
| 10074546 | Processing liquid supplying apparatus and processing liquid supplying method | Yuichi Terashita, Koji Takayanagi, Toshinobu Furusho, Takashi Sasa | 2018-09-11 |
| 10068763 | Coating film forming method, coating film forming apparatus, and storage medium | Takafumi Niwa | 2018-09-04 |
| 10048664 | Coating method, computer storage medium and coating apparatus | Takafumi Hasimoto, Shinichi Hatakeyama, Naoki Shibata, Minoru Kubota, Hiroyuki Ide | 2018-08-14 |
| 10035173 | Chemical supply system, substrate treatment apparatus incorporating the same, and coating and developing system incorporating the same apparatus | Toshinobu Furusho, Takahiro Ookubo, Yusuke Yamamoto, Steffen Hornig | 2018-07-31 |
| 10025190 | Substrate treatment system | Seiji Nagahara, Gousuke Shiraishi, Satoru Shimura, Shinichiro KAWAKAMI, Masaru Tomono +2 more | 2018-07-17 |
| 10022652 | Solution treatment apparatus and solution treatment method | Katsunori Ichino, Toshinobu Furusho, Takashi Sasa, Katsuhiro Tsuchiya, Yuichi Terashita +1 more | 2018-07-17 |
| 9947534 | Coating treatment method with airflow control, and non-transitory recording medium having program recorded thereon for executing coating treatment with airflow control | Koji Takayanagi, Shinichi Hatakeyama, Kohei Kawakami | 2018-04-17 |
| 9878267 | Solution treatment apparatus and solution treatment method | Katsunori Ichino, Toshinobu Furusho, Takashi Sasa, Katsuhiro Tsuchiya, Yuichi Terashita +1 more | 2018-01-30 |
| 9846363 | Processing liquid supplying apparatus and method of supplying processing liquid | Koji Takayanagi, Toshinobu Furusho, Takashi Sasa, Daisuke Ishimaru | 2017-12-19 |
| 9817323 | Liquid treatment apparatus and method and non-transitory storage medium | Yuichi Yoshida | 2017-11-14 |
| 9805958 | Substrate cleaning apparatus, substrate cleaning method and non-transitory storage medium | Atsushi Ookouchi, Hiroshi Ichinomiya, Hirosi Nisihata, Ryouichirou Naitou | 2017-10-31 |