Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12072625 | Nozzle unit, liquid treatment apparatus, and liquid treatment method | Takuya MIURA, Kouichirou Tanaka, Shogo Takahashi, Yusuke MIYAKUBO | 2024-08-27 |
| 11433420 | Solution supply apparatus and solution supply method | Ryouichirou Naitou, Masato Hayashi, Hideo Shite, Hiroyuki Ide, Yosuke Kameda +4 more | 2022-09-06 |
| 11141758 | Film forming method, storage medium, and film forming system | Yuichi Yoshida, Naoki Shibata, Kousuke Yoshihara | 2021-10-12 |
| 10295903 | Substrate processing method, substrate processing apparatus and storage medium | Shinichi Hatakeyama, Masanobu Watanabe, Kouzo Nishi, Seiya Totsuka | 2019-05-21 |