Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11433420 | Solution supply apparatus and solution supply method | Ryouichirou Naitou, Masato Hayashi, Hideo Shite, Hiroyuki Ide, Yosuke Kameda +4 more | 2022-09-06 |
| 10295903 | Substrate processing method, substrate processing apparatus and storage medium | Shinichi Hatakeyama, Masanobu Watanabe, Kouzo Nishi, Kentaro Yoshihara | 2019-05-21 |
| 9649577 | Bubble removing method, bubble removing apparatus, degassing apparatus, and computer-readable recording medium | Tomohiro Iseki, Hideo Funakoshi | 2017-05-16 |