Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12032294 | Abnormality detection device of chemical solution, liquid processing device, substrate processing apparatus, abnormality detection method of chemical solution, liquid processing method, and substrate processing method | Masato Hayashi, Takuya Mori, Hirokazu Sakamoto | 2024-07-09 |
| 11664249 | Substrate processing apparatus, substrate processing method, and recording medium | Seiichi KURE, Ryouichirou Naitou | 2023-05-30 |
| 11465168 | Liquid processing device and liquid processing method | Hiroyuki Ide, Kousuke Yoshihara | 2022-10-11 |
| 11433420 | Solution supply apparatus and solution supply method | Ryouichirou Naitou, Masato Hayashi, Hiroyuki Ide, Yosuke Kameda, Seiya Totsuka +4 more | 2022-09-06 |
| 10518199 | Treatment solution supply apparatus | Takashi Sasa, Daisuke Ishimaru, Katsuya Hashimoto, Shinya Wakamizu, Kazuhiko Kimura | 2019-12-31 |
| 10121685 | Treatment solution supply method, non-transitory computer-readable storage medium, and treatment solution supply apparatus | Kazuhiko Kimura, Tomoyuki Yumoto | 2018-11-06 |
| 7790227 | Coating process apparatus and coating film forming method | — | 2010-09-07 |
| 7575634 | Coating device and coating film forming method | — | 2009-08-18 |
| 7384595 | Heat-treating apparatus and heat-treating method | Kazuhiko Ooshima, Yuichi Terashita, Momoko Shizukuishi, Kousuke Yoshihara | 2008-06-10 |