Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10518199 | Treatment solution supply apparatus | Takashi Sasa, Daisuke Ishimaru, Katsuya Hashimoto, Hideo Shite, Kazuhiko Kimura | 2019-12-31 |
| 8398320 | Non-transitory storage medium for rinsing or developing sequence | Yasuhiro Takaki, Osamu Miyahara, Keiichi Tanaka, Takashi Terada | 2013-03-19 |
| 8054443 | Developing method and developing apparatus | Junichi Kitano, Osamu Miyahara | 2011-11-08 |
| 7968278 | Rinse treatment method and development process method | Yasuhiro Takaki, Osamu Miyahara, Keiichi Tanaka, Takashi Terada | 2011-06-28 |
| 7486377 | Developing method and developing apparatus | Junichi Kitano, Osamu Miyahara | 2009-02-03 |