Issued Patents All Time
Showing 25 most recent of 174 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431361 | Self-aligned double patterning with spatial atomic layer deposition | Ning Li, Victor Nguyen, Mihaela Balseanu, Li-Qun Xia, Steven Marcus | 2025-09-30 |
| 12078763 | Radiation analysis system, charged particle beam system, and radiation analysis method | Akira Takano | 2024-09-03 |
| 11887818 | Methods and systems to modulate film stress | Tsutomu Tanaka, John C. Forster, Ran Liu, Kenichi Ohno, Ning Li +2 more | 2024-01-30 |
| 11768299 | Radiation analyzer | Akira Takano | 2023-09-26 |
| 11693319 | Substrate processing method, substrate processing apparatus, and storage medium | Kosuke Yoshihara, Yoshihiro Kondo, Makoto Muramatsu, Teruhiko Kodama | 2023-07-04 |
| 11692267 | Plasma induced modification of silicon carbide surface | Francis Kanyiri Mungai, Vijayabhaskara Venkatagiriyappa, Yung-Cheng Hsu, Mario David Silvetti, Mihaela Balseanu | 2023-07-04 |
| 11581213 | Susceptor wafer chucks for bowed wafers | Abhishek Chowdhury, Vijayabhaskara Venkatagiriyappa, Mihaela Balseanu, Jyoti Prakash Deo, Srinivas Ramakrishna +4 more | 2023-02-14 |
| 11520233 | Substrate processing apparatus, substrate processing method, and storage medium | — | 2022-12-06 |
| 11515144 | In-situ film annealing with spatial atomic layer deposition | Andrew Short, Mandyam Sriram, Srinivas Gandikota | 2022-11-29 |
| 11488097 | Pickup request system and pickup request method | Kumi Harada, Makoto HIROKI, Keiji Sakaguchi, Norikazu Tagaki | 2022-11-01 |
| 11443743 | Voice control information output system, voice control information output method, and recording medium | Kiyonori Kido | 2022-09-13 |
| 11410834 | Substrate processing method | Tatsuo Matsudo | 2022-08-09 |
| 11402758 | Substrate processing apparatus, substrate processing method, and storage medium | — | 2022-08-02 |
| 11164753 | Self-aligned double patterning with spatial atomic layer deposition | Ning Li, Victor Nguyen, Mihaela Balseanu, Li-Qun Xia, Steven Marcus | 2021-11-02 |
| 11158489 | Methods and systems to modulate film stress | Tsutomu Tanaka, John C. Forster, Ran Liu, Kenichi Ohno, Ning Li +2 more | 2021-10-26 |
| 11081318 | Geometrically selective deposition of dielectric films utilizing low frequency bias | Kenichi Ohno, Li-Qun Xia, Tsutomu Tanaka, Dmitry A. Dzilno, Mario David Silvetti +4 more | 2021-08-03 |
| 11028477 | Bottom-up gap-fill by surface poisoning treatment | Mark Saly, Eswaranand Venkatasubramanian, Mandyam Sriram, Bhaskar Jyoti Bhuyan, Pramit Manna +2 more | 2021-06-08 |
| 10908104 | Radiation analysis apparatus | Satoshi Nakayama, Atsushi Nagata, Kazuo Chinone | 2021-02-02 |
| 10896858 | Processing apparatus and processing method | — | 2021-01-19 |
| 10854428 | Spatial atomic layer deposition chamber with plasma pulsing to prevent charge damage | Tsutomu Tanaka, Dmitry A. Dzilno, Alexander V. Garachtchenko | 2020-12-01 |
| 10801977 | Radiation analyzing apparatus and radiation analyzing method | Atsushi Nagata, Satoshi Nakayama, Kazuo Chinone | 2020-10-13 |
| 10606177 | Substrate processing apparatus, substrate processing method, and storage medium | Tomohiro Iseki | 2020-03-31 |
| 10185534 | Control method, controller, and recording medium | Hiroto KANDA, Masafumi Okubo, Tomonori Nakamura | 2019-01-22 |
| 10164844 | Device cooperation service execution apparatus, device cooperation service execution method, and computer-readable recording medium | Yuki Taoka, Kenji Masuda | 2018-12-25 |
| 10056081 | Control method, controller, and non-transitory recording medium | Yuji Kunitake, Hidetaka Ohto | 2018-08-21 |