Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10901320 | Developing method, developing apparatus, and computer-readable recording medium | Hirofumi Takeguchi, Yuichi Terashita | 2021-01-26 |
| 10606177 | Substrate processing apparatus, substrate processing method, and storage medium | Keiichi Tanaka | 2020-03-31 |
| 10211050 | Method for photo-lithographic processing in semiconductor device manufacturing | Hidetami Yaegashi, Kenichi Oyama, Masatoshi Yamato, Toyohisa Tsuruda | 2019-02-19 |
| 10120286 | Developing method, developing apparatus, and computer-readable recording medium | Hirofumi Takeguchi, Yuichi Terashita | 2018-11-06 |
| 9952512 | Developing method, developing apparatus, and computer-readable storage medium | Hirofumi Takeguchi, Yuichi Terashita | 2018-04-24 |
| 9899243 | Light irradiation apparatus | Masahide Tadokoro, Yuichi Terashita, Gousuke Shiraishi, Masaru Tomono, Hironori Mizoguchi | 2018-02-20 |
| 9690202 | Developing method, developing apparatus and storage medium | Yuichi Terashita, Hirofumi Takeguchi, Takeshi Shimoaoki, Kousuke Yoshihara | 2017-06-27 |
| 9649577 | Bubble removing method, bubble removing apparatus, degassing apparatus, and computer-readable recording medium | Hideo Funakoshi, Seiya Totsuka | 2017-05-16 |
| 9627232 | Substrate processing method, substrate processing apparatus and non-transitory storage medium | Keiichi Tanaka, Kousuke Yoshihara | 2017-04-18 |
| 8956694 | Developing apparatus, developing method and storage medium | Hirofumi Takeguchi, Yuichi Yoshida, Kousuke Yoshihara | 2015-02-17 |
| 8851011 | Coating treatment method, coating treatment apparatus, and computer-readable storage medium | Kousuke Yoshihara, Koji Takayanagi | 2014-10-07 |
| 8697187 | Coating treatment method and coating treatment apparatus | Yoshiteru Fukuda, Takayuki Ishii | 2014-04-15 |
| 8505479 | Resist coating apparatus | Kousuke Yoshihara | 2013-08-13 |
| 8496991 | Coating treatment method | Kousuke Yoshihara | 2013-07-30 |
| 8414972 | Coating treatment method, coating treatment apparatus, and computer-readable storage medium | Kousuke Yoshihara, Koji Takayanagi | 2013-04-09 |
| 8318247 | Coating treatment method, coating treatment apparatus, and computer-readable storage medium | Kousuke Yoshihara, Koji Takayanagi | 2012-11-27 |
| 8304018 | Coating method | Koji Takayanagi, Katsunori Ichino, Kousuke Yoshihara | 2012-11-06 |
| 8225738 | Resist coating method and resist coating apparatus | Kousuke Yoshihara | 2012-07-24 |
| 8043657 | Coating treatment method | Kousuke Yoshihara | 2011-10-25 |
| 7906173 | Resist coating method and resist coating apparatus | Kousuke Yoshihara | 2011-03-15 |
| 7832352 | Coating treatment method and coating treatment apparatus | Yoshiteru Fukuda, Takayuki Ishii | 2010-11-16 |
| 7820243 | Resist coating method and resist coating apparatus | Kousuke Yoshihara | 2010-10-26 |
| 7520936 | Hardening processing apparatus, hardening processing method, and coating film forming apparatus | Shinji Nagashima | 2009-04-21 |
| 7479190 | Coating treatment apparatus and coating treatment method | Yoshiteru Fukuda, Takayuki Ishii | 2009-01-20 |