Issued Patents All Time
Showing 1–25 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362743 | Semiconductor device | — | 2025-07-15 |
| 12257611 | Cleaning jig, coating apparatus, and cleaning method | Satoshi Shimmura, Kenta SHIBASAKI, Hiroichi Inada | 2025-03-25 |
| 11868057 | Solution treatment apparatus and cleaning method | Kenta SHIBASAKI, Hiroichi Inada, Satoshi Shimmura, Kenji Yada, Shinichi Seki +1 more | 2024-01-09 |
| 11862485 | Nozzle standby device, liquid processing apparatus and operation method of liquid processing apparatus | Satoshi Shimmura, Kohei Kawakami, Hiroichi Inada | 2024-01-02 |
| 11342198 | Processing liquid supplying apparatus and processing liquid supplying method | Yuichi Terashita, Kousuke Yoshihara, Toshinobu Furusho, Takashi Sasa | 2022-05-24 |
| 11273464 | Substrate processing apparatus | Satoshi Shimmura, Yuji Sakai, Kenta SHIBASAKI, Kenji Yada, Hiroichi Inada +2 more | 2022-03-15 |
| 11088111 | Semiconductor device | — | 2021-08-10 |
| 11062899 | Coated film removing apparatus | Takafumi Hasimoto, Masahide Tadokoro, Taku Nagakane | 2021-07-13 |
| 10974181 | Filter unit pretreatment method, treatment liquid supply apparatus, filter unit heating apparatus, and treatment liquid supply passage pretreatment method | Yuichi Yoshida, Ryouichirou Naitou, Arnaud Alain Jean DAUENDORFFER, Shinobu Miyazaki | 2021-04-13 |
| 10838311 | Coating and developing apparatus and coating and developing method | Keigo Nakano, Masashi Tsuchiyama | 2020-11-17 |
| 10734251 | Liquid processing apparatus, liquid processing method, and storage medium for liquid process | Yukie Minekawa, Yuichi Yoshida, Kousuke Yoshihara, Yuichi Terashita, Toshinobu Furusho +1 more | 2020-08-04 |
| 10493387 | Filter unit pretreatment method, treatment liquid supply apparatus, filter unit heating apparatus, and treatment liquid supply passage pretreatment method | Yuichi Yoshida, Ryouichirou Naitou, Arnaud Alain Jean DAUENDORFFER, Shinobu Miyazaki | 2019-12-03 |
| 10396549 | Semiconductor device | Masashi Arakawa, Tadashi Fukui | 2019-08-27 |
| 10268116 | Processing liquid supplying apparatus and method of supplying processing liquid | Kousuke Yoshihara, Toshinobu Furusho, Takashi Sasa, Daisuke Ishimaru | 2019-04-23 |
| 10256122 | Substrate heating method | Masato Mizuta | 2019-04-09 |
| 10236868 | Semiconductor device | — | 2019-03-19 |
| 10074546 | Processing liquid supplying apparatus and processing liquid supplying method | Yuichi Terashita, Kousuke Yoshihara, Toshinobu Furusho, Takashi Sasa | 2018-09-11 |
| 10062669 | Semiconductor device | — | 2018-08-28 |
| 9991140 | Substrate heating device, substrate heating method and computer-readable storage medium | Masato Mizuta | 2018-06-05 |
| 9947534 | Coating treatment method with airflow control, and non-transitory recording medium having program recorded thereon for executing coating treatment with airflow control | Kousuke Yoshihara, Shinichi Hatakeyama, Kohei Kawakami | 2018-04-17 |
| 9948283 | Semiconductor device | — | 2018-04-17 |
| 9948090 | Semiconductor device | Masashi Arakawa, Tadashi Fukui | 2018-04-17 |
| 9846363 | Processing liquid supplying apparatus and method of supplying processing liquid | Kousuke Yoshihara, Toshinobu Furusho, Takashi Sasa, Daisuke Ishimaru | 2017-12-19 |
| 9732910 | Processing-liquid supply apparatus and processing-liquid supply method | Kousuke Yoshihara, Yuichi Terashita, Toshinobu Furusho, Takashi Sasa | 2017-08-15 |
| 9576934 | Semiconductor device | — | 2017-02-21 |