Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12257611 | Cleaning jig, coating apparatus, and cleaning method | Koji Takayanagi, Kenta SHIBASAKI, Hiroichi Inada | 2025-03-25 |
| 11868057 | Solution treatment apparatus and cleaning method | Kenta SHIBASAKI, Hiroichi Inada, Koji Takayanagi, Kenji Yada, Shinichi Seki +1 more | 2024-01-09 |
| 11862485 | Nozzle standby device, liquid processing apparatus and operation method of liquid processing apparatus | Kohei Kawakami, Hiroichi Inada, Koji Takayanagi | 2024-01-02 |
| 11273464 | Substrate processing apparatus | Yuji Sakai, Kenta SHIBASAKI, Koji Takayanagi, Kenji Yada, Hiroichi Inada +2 more | 2022-03-15 |
| 11235350 | Solution treatment apparatus and cleaning method for solution treatment apparatus | Yuji Sakai, Kousuke Yoshihara | 2022-02-01 |
| 10379441 | Liquid processing apparatus | — | 2019-08-13 |
| 8430967 | Hydrophobicizing apparatus, hydrophobicizing method and storage medium | Tetsuo Fukuoka, Takahiro Kitano | 2013-04-30 |