Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12358016 | Cup, liquid processing apparatus, and liquid processing method | Ryunosuke Higashi, Yoshihiro Imura, Kohei Kawakami, Yuhei Maeda | 2025-07-15 |
| 12007692 | Nozzle, substrate processing apparatus, and substrate processing method | Hiroki Sakurai, Nobuhiro Ogata, Daisuke Goto, Kanta Mori, Yusuke Hashimoto +2 more | 2024-06-11 |
| 11868057 | Solution treatment apparatus and cleaning method | Kenta SHIBASAKI, Hiroichi Inada, Satoshi Shimmura, Koji Takayanagi, Shinichi Seki +1 more | 2024-01-09 |
| 11273464 | Substrate processing apparatus | Satoshi Shimmura, Yuji Sakai, Kenta SHIBASAKI, Koji Takayanagi, Hiroichi Inada +2 more | 2022-03-15 |
| 10328546 | Polishing cleaning mechanism, substrate processing apparatus, and substrate processing method | Akihiro Kubo, Masahiro Fukuda, Taro Yamamoto, Masashi Enomoto, Noboru Nakashima | 2019-06-25 |
| 9669510 | Polishing cleaning mechanism, substrate processing apparatus, and substrate processing method | Akihiro Kubo, Masahiro Fukuda, Taro Yamamoto, Masashi Enomoto, Noboru Nakashima | 2017-06-06 |