Issued Patents All Time
Showing 1–25 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12379200 | Peripheral edge processing apparatus, peripheral edge processing method, and computer-readable recording medium | Hideaki Kashiwagi, Naoto Nakamura | 2025-08-05 |
| 12228390 | Information processing apparatus, information processing method and computer-readable recording medium | Masahide Tadokoro, Toyohisa Tsuruda, Hiroshi Nakamura, Kazuhiro Shiba | 2025-02-18 |
| 12197129 | Substrate treatment method and substrate treatment system | Satoru Shimura, Soichiro Okada, Hidetami Yaegashi | 2025-01-14 |
| 12148147 | Substrate inspection device, substrate inspection method, and storage medium | Masato Hosaka | 2024-11-19 |
| 12123778 | Thermal imaging sensor for integration into track system | Michael A. Carcasi, Kazuhiro Shiba, Masahide Tadokoro, Toyohisa Tsuruda | 2024-10-22 |
| 12051587 | Substrate processing apparatus, estimation method of substrate processing and recording medium | Hiroshi Nakamura, Masahide Tadokoro | 2024-07-30 |
| 12002676 | Method for forming mask pattern, storage medium, and apparatus for processing substrate | Takashi Yamauchi, Shinichiro KAWAKAMI | 2024-06-04 |
| 11876022 | Substrate treatment method and substrate treatment system | Hiroshi Nakamura, Toyohisa Tsuruda | 2024-01-16 |
| 11809091 | Substrate processing apparatus and processing condition adjustment method | Masahide Tadokoro, Kentaro Yamamura | 2023-11-07 |
| 11637031 | Systems and methods for spin process video analysis during substrate processing | Michael A. Carcasi, Joshua Hooge, Mark H. Somervell, Hiroyuki Iwaki, Masahide Tadokoro +2 more | 2023-04-25 |
| 11604415 | Substrate processing method, substrate processing apparatus, and computer readable recording medium | Takashi Yamauchi, Shinichiro KAWAKAMI | 2023-03-14 |
| 11594424 | Substrate processing method and substrate processing apparatus | Takahiro Shiozawa | 2023-02-28 |
| 11508580 | Method for forming mask pattern, storage medium, and apparatus for processing substrate | Takashi Yamauchi, Shinichiro KAWAKAMI | 2022-11-22 |
| 11287798 | Substrate processing capable of suppressing a decrease in throughput while reducing the impact on exposure treatment caused by warping of a substrate | Teruhiko Kodama | 2022-03-29 |
| 11036140 | Substrate processing apparatus, substrate processing method and recording medium | Shinichiro KAWAKAMI, Hiroshi Mizunoura, Yohei SANO, Takashi Yamauchi | 2021-06-15 |
| 10964606 | Film forming system, film forming method, and computer storage medium | Satoru Shimura | 2021-03-30 |
| 10656526 | Substrate treatment method and thermal treatment apparatus | Yohei SANO, Shinichiro KAWAKAMI, Takahiro Shiozawa, Keisuke Yoshida, Tomoya ONITSUKA | 2020-05-19 |
| 10649335 | Substrate processing apparatus, substrate processing method and storage medium | Teruhiko Kodama, Masahide Tadokoro, Takafumi Hashimoto | 2020-05-12 |
| 10528028 | Substrate processing apparatus, substrate processing method and memory medium | Teruhiko Kodama | 2020-01-07 |
| 10520831 | Substrate processing method, substrate processing system and substrate processing apparatus | Yoshihiro Kondo | 2019-12-31 |
| 10328546 | Polishing cleaning mechanism, substrate processing apparatus, and substrate processing method | Akihiro Kubo, Masahiro Fukuda, Taro Yamamoto, Kenji Yada, Noboru Nakashima | 2019-06-25 |
| 10132972 | Optical element and method for producing the same | Tsutomu Nagahama, Hironori Yoshida, Masaharu Senoue, Hiroyuki Itou | 2018-11-20 |
| 9669510 | Polishing cleaning mechanism, substrate processing apparatus, and substrate processing method | Akihiro Kubo, Masahiro Fukuda, Taro Yamamoto, Kenji Yada, Noboru Nakashima | 2017-06-06 |
| 9601394 | Substrate processing apparatus, substrate processing method and memory medium | Teruhiko Kodama | 2017-03-21 |
| 9588267 | Optical element and method for producing the same | Tsutomu Nagahama, Hironori Yoshida, Masaharu Senoue, Hiroyuki Itou | 2017-03-07 |