Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11809091 | Substrate processing apparatus and processing condition adjustment method | Masahide Tadokoro, Masashi Enomoto | 2023-11-07 |
| 8512478 | Cleaning and drying-preventing method, and cleaning and drying-preventing apparatus | Yasuyuki Kometani, Takeshi Hirao, Kenichi Miyamoto | 2013-08-20 |
| 8216390 | Cleaning and drying-preventing method, and cleaning and drying-preventing apparatus | Yasuyuki Kometani, Takeshi Hirao, Kenichi Miyamoto | 2012-07-10 |
| 7901514 | Substrate cleaning method and developing apparatus | Junji Nakamura, Kousuke Yoshihara, Fumiko Iwao, Hirofumi Takeguchi | 2011-03-08 |
| 7604013 | Substrate cleaning method and developing apparatus | Junji Nakamura, Kousuke Yoshihara, Fumiko Iwao, Hirofumi Takeguchi | 2009-10-20 |