Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9741559 | Film forming method, computer storage medium, and film forming system | Satoru Shimura, Kousuke Yoshihara | 2017-08-22 |
| 9341952 | Substrate treatment method, non-transitory computer storage medium and substrate treatment system | Satoru Shimura | 2016-05-17 |
| 9329483 | Film forming method, non-transitory computer storage medium and film forming apparatus | Satoru Shimura | 2016-05-03 |
| 9280052 | Substrate treatment method, non-transitory computer storage medium and substrate treatment system | Satoru Shimura | 2016-03-08 |
| 8842257 | Substrate treatment method, substrate treatment apparatus, and non-transitory computer storage medium | Shinji Kobayashi | 2014-09-23 |
| 8791030 | Coating treatment method and coating treatment apparatus | Satoru Shimura, Kousuke Yoshihara | 2014-07-29 |
| 8530357 | Method for manufacturing semiconductor device and apparatus for manufacturing semiconductor device | — | 2013-09-10 |
| 8202682 | Method of manufacturing semiconductor device, and resist coating and developing system | Satoru Shimura, Tetsu Kawasaki | 2012-06-19 |
| 7901514 | Substrate cleaning method and developing apparatus | Junji Nakamura, Kousuke Yoshihara, Kentaro Yamamura, Hirofumi Takeguchi | 2011-03-08 |
| 7604013 | Substrate cleaning method and developing apparatus | Junji Nakamura, Kousuke Yoshihara, Kentaro Yamamura, Hirofumi Takeguchi | 2009-10-20 |
| 6793793 | Electrochemical treating method such as electroplating and electrochemical reaction device therefor | Hideo Yoshida, Seizo Miyata, Yoshihiro Asai, Masato Sone, Hiroe Asai | 2004-09-21 |