Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11769661 | Substrate processing method and substrate processing apparatus | Kazuyoshi Shinohara, Takahisa Otsuka, Suguen Lee | 2023-09-26 |
| 10901320 | Developing method, developing apparatus, and computer-readable recording medium | Tomohiro Iseki, Yuichi Terashita | 2021-01-26 |
| 10120286 | Developing method, developing apparatus, and computer-readable recording medium | Tomohiro Iseki, Yuichi Terashita | 2018-11-06 |
| 10022652 | Solution treatment apparatus and solution treatment method | Kousuke Yoshihara, Katsunori Ichino, Toshinobu Furusho, Takashi Sasa, Katsuhiro Tsuchiya +1 more | 2018-07-17 |
| 9952512 | Developing method, developing apparatus, and computer-readable storage medium | Tomohiro Iseki, Yuichi Terashita | 2018-04-24 |
| 9878267 | Solution treatment apparatus and solution treatment method | Kousuke Yoshihara, Katsunori Ichino, Toshinobu Furusho, Takashi Sasa, Katsuhiro Tsuchiya +1 more | 2018-01-30 |
| 9731226 | Solution treatment apparatus and solution treatment method | Kousuke Yoshihara, Katsunori Ichino, Toshinobu Furusho, Takashi Sasa, Katsuhiro Tsuchiya +1 more | 2017-08-15 |
| 9690202 | Developing method, developing apparatus and storage medium | Yuichi Terashita, Takeshi Shimoaoki, Kousuke Yoshihara, Tomohiro Iseki | 2017-06-27 |
| 9256131 | Developing method for developing apparatus | Taro Yamamoto, Kousuke Yoshihara | 2016-02-09 |
| 8956694 | Developing apparatus, developing method and storage medium | Tomohiro Iseki, Yuichi Yoshida, Kousuke Yoshihara | 2015-02-17 |
| 8865396 | Developing method and developing apparatus | Taro Yamamoto, Kousuke Yoshihara | 2014-10-21 |
| 8469614 | Substrate treatment method, computer storage medium and substrate treatment apparatus | Yuichi Yoshida | 2013-06-25 |
| 8445189 | Developing device and developing method | Taro Yamamoto, Kousuke Yoshihara, Hideharu Kyouda, Atsushi Ookouchi | 2013-05-21 |
| 8440266 | Developing device, developing method and storage medium | Norikatsu Sato | 2013-05-14 |
| 8147153 | Rinsing method, developing method, developing system and computer-read storage medium | Junji Nakamura, Kousuke Yoshihara | 2012-04-03 |
| 8029624 | Rinse method and developing apparatus | Kousuke Yoshihara, Junji Nakamura, Taro Yamamoto | 2011-10-04 |
| 8026048 | Developing apparatus and developing method | Atsushi Ookouchi, Taro Yamamoto, Hideharu Kyouda, Kousuke Yoshihara | 2011-09-27 |
| 7918182 | Developing device and developing method | Taro Yamamoto, Kousuke Yoshihara, Hideharu Kyouda, Atsushi Ookouchi | 2011-04-05 |
| 7901514 | Substrate cleaning method and developing apparatus | Junji Nakamura, Kousuke Yoshihara, Kentaro Yamamura, Fumiko Iwao | 2011-03-08 |
| 7896562 | Developing method, developing apparatus and storage medium | Taro Yamamoto, Atsushi Ookouchi, Kousuke Yoshihara | 2011-03-01 |
| 7841787 | Rinsing method, developing method, developing system and computer-read storage medium | Junji Nakamura, Kousuke Yoshihara | 2010-11-30 |
| 7823534 | Development device and development method | Atsushi Ookouchi, Taro Yamamoto, Hideharu Kyouda, Kousuke Yoshihara | 2010-11-02 |
| 7806076 | Developing apparatus and method | Taro Yamamoto, Atsushi Ookouchi, Kousuke Yoshihara | 2010-10-05 |
| 7665918 | Developing apparatus, developing method and storage medium | Taro Yamamoto, Shuichi Nagamine | 2010-02-23 |
| 7604013 | Substrate cleaning method and developing apparatus | Junji Nakamura, Kousuke Yoshihara, Kentaro Yamamura, Fumiko Iwao | 2009-10-20 |