Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774854 | Substrate processing method, storage medium, and substrate processing apparatus | Yusaku Hashimoto, Kouichirou Tanaka, Masahiro Fukuda | 2023-10-03 |
| 11480881 | Substrate processing method, storage medium, and substrate processing apparatus | Yusaku Hashimoto, Kouichirou Tanaka, Masahiro Fukuda | 2022-10-25 |
| 9805958 | Substrate cleaning apparatus, substrate cleaning method and non-transitory storage medium | Kousuke Yoshihara, Hiroshi Ichinomiya, Hirosi Nisihata, Ryouichirou Naitou | 2017-10-31 |
| 9704730 | Substrate cleaning apparatus, substrate cleaning method and non-transitory storage medium | Kousuke Yoshihara, Hiroshi Ichinomiya, Hirosi Nisihata | 2017-07-11 |
| 9570327 | Substrate liquid treatment apparatus and substrate liquid treatment method | Masahiro Fukuda, Akihiro Kubo, Taro Yamamoto, Kenzi YADA | 2017-02-14 |
| 8545119 | Substrate cleaning apparatus, coating and developing apparatus having the same and substrate cleaning method | Junji Kume | 2013-10-01 |
| 8474396 | Developing apparatus, resist pattern forming method and storage medium | Masahiro Fukuda, Taro Yamamoto | 2013-07-02 |
| 8455183 | Resist pattern slimming treatment method | Toyohisa Tsuruda, Yoshihiro Kondo, Masahiro Yamamoto | 2013-06-04 |
| 8445189 | Developing device and developing method | Taro Yamamoto, Kousuke Yoshihara, Hideharu Kyouda, Hirofumi Takeguchi | 2013-05-21 |
| 8026048 | Developing apparatus and developing method | Taro Yamamoto, Hirofumi Takeguchi, Hideharu Kyouda, Kousuke Yoshihara | 2011-09-27 |
| 7918182 | Developing device and developing method | Taro Yamamoto, Kousuke Yoshihara, Hideharu Kyouda, Hirofumi Takeguchi | 2011-04-05 |
| 7896562 | Developing method, developing apparatus and storage medium | Taro Yamamoto, Hirofumi Takeguchi, Kousuke Yoshihara | 2011-03-01 |
| 7823534 | Development device and development method | Taro Yamamoto, Hirofumi Takeguchi, Hideharu Kyouda, Kousuke Yoshihara | 2010-11-02 |
| 7806076 | Developing apparatus and method | Taro Yamamoto, Hirofumi Takeguchi, Kousuke Yoshihara | 2010-10-05 |
| 7601933 | Heat processing apparatus and heat processing method | Kousuke Yoshihara, Yuichi Terashita, Momoko Shizukuishi, Hideharu Kyouda | 2009-10-13 |
| 6991385 | Method for developing processing and apparatus for supplying developing solution | Kousuke Yoshihara, Keiichi Tanaka, Taro Yamamoto, Hideharu Kyouda, Hirofumi Takeguchi | 2006-01-31 |
| 6811962 | Method for developing processing and apparatus for supplying developing solution | Kousuke Yoshihara, Keiichi Tanaka, Taro Yamamoto, Hideharu Kyouda, Hirofumi Takeguchi | 2004-11-02 |