Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8545119 | Substrate cleaning apparatus, coating and developing apparatus having the same and substrate cleaning method | Atsushi Ookouchi | 2013-10-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8545119 | Substrate cleaning apparatus, coating and developing apparatus having the same and substrate cleaning method | Atsushi Ookouchi | 2013-10-01 |