Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664249 | Substrate processing apparatus, substrate processing method, and recording medium | Seiichi KURE, Hideo Shite | 2023-05-30 |
| 11567444 | Developing treatment apparatus and developing treatment method | Hidenori Tosu, Takahiro Yamaguchi, Seiichi KURE | 2023-01-31 |
| 11433420 | Solution supply apparatus and solution supply method | Masato Hayashi, Hideo Shite, Hiroyuki Ide, Yosuke Kameda, Seiya Totsuka +4 more | 2022-09-06 |
| 10974181 | Filter unit pretreatment method, treatment liquid supply apparatus, filter unit heating apparatus, and treatment liquid supply passage pretreatment method | Yuichi Yoshida, Arnaud Alain Jean DAUENDORFFER, Koji Takayanagi, Shinobu Miyazaki | 2021-04-13 |
| 10493387 | Filter unit pretreatment method, treatment liquid supply apparatus, filter unit heating apparatus, and treatment liquid supply passage pretreatment method | Yuichi Yoshida, Arnaud Alain Jean DAUENDORFFER, Koji Takayanagi, Shinobu Miyazaki | 2019-12-03 |
| 9975073 | Processing liquid supply method, processing liquid supply apparatus and storage medium | Yuichi Yoshida, Toshinobu Furusho | 2018-05-22 |
| 9805958 | Substrate cleaning apparatus, substrate cleaning method and non-transitory storage medium | Atsushi Ookouchi, Kousuke Yoshihara, Hiroshi Ichinomiya, Hirosi Nisihata | 2017-10-31 |
| 9162163 | Processing liquid supply method, processing liquid supply apparatus and storage medium | Yuichi Yoshida, Toshinobu Furusho | 2015-10-20 |
| 7419773 | Rinsing method and developing method | Takeshi Shimoaoki | 2008-09-02 |