Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11079679 | Substrate processing method and recording medium capable of suppressing non-uniformity in degree of progression of processing depending on position on substrate | Yusaku Hashimoto, Masahiro Fukuda, Kouichirou Tanaka | 2021-08-03 |
| 10359702 | Development processing apparatus, development processing method, and storage medium | Yusaku Hashimoto, Shogo Inaba | 2019-07-23 |
| 10203605 | Development method, development device, and non-transitory computer-readable storage medium | Yusaku Hashimoto, Masahiro Fukuda, Kouichirou Tanaka | 2019-02-12 |
| 10185220 | Substrate processing method, substrate processing apparatus, and non-transitory computer-readable medium | Yusaku Hashimoto, Masahiro Fukuda, Kouichirou Tanaka | 2019-01-22 |
| 10108111 | Developing method, developing apparatus, and storage medium | Yusaku Hashimoto, Masahiro Fukuda | 2018-10-23 |
| 9690202 | Developing method, developing apparatus and storage medium | Yuichi Terashita, Hirofumi Takeguchi, Kousuke Yoshihara, Tomohiro Iseki | 2017-06-27 |
| 7977039 | Rinse treatment method, developing treatment method and developing apparatus | Junichi Kitano | 2011-07-12 |
| 7419773 | Rinsing method and developing method | Ryouichirou Naitou | 2008-09-02 |