Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11773492 | Substrate processing apparatus, substrate processing method, and storage medium | Masatoshi Kawakita | 2023-10-03 |
| 11679976 | Structure forming method and device | — | 2023-06-20 |
| 11557495 | Coating film forming method | — | 2023-01-17 |
| 11065639 | Coating treatment method, computer storage medium and coating treatment apparatus | Kosuke Yoshihara, Shinichi Hatakeyama | 2021-07-20 |
| 10761109 | Physical quantity sensor, inertia measurement device, vehicle positioning device, portable electronic apparatus, electronic apparatus, and vehicle | Atsuki NARUSE, Shigekazu Takagi, Tomokazu UMENO, Satoru Tanaka | 2020-09-01 |
| 10359702 | Development processing apparatus, development processing method, and storage medium | Takeshi Shimoaoki, Yusaku Hashimoto | 2019-07-23 |
| 9176013 | Sensor, electronic apparatus, robot, and mobile object | Kyo Horie | 2015-11-03 |
| 9154109 | Vibrator, oscillator, electronic apparatus, moving object, and method of manufacturing vibrator | Akinori Yamada, Aritsugu Yajima | 2015-10-06 |
| 8796845 | Electronic device covered by multiple layers and method for manufacturing electronic device | Yoko KANEMOTO, Akira Sato | 2014-08-05 |
| 8760234 | MEMS vibrator and oscillator | — | 2014-06-24 |
| 8592925 | Functional device with functional structure of a microelectromechanical system disposed in a cavity of a substrate, and manufacturing method thereof | — | 2013-11-26 |
| 8552512 | MEMS device and fabrication method thereof | Akira Sato, Toru Watanabe, Takeshi Mori | 2013-10-08 |
| 8525277 | MEMS device | — | 2013-09-03 |
| 8432232 | MEMS device and oscillator | — | 2013-04-30 |
| 8410561 | Electronic device and method for manufacturing thereof | Akira Sato, Toru Watanabe, Takeshi Mori | 2013-04-02 |
| 8395227 | MEMS device having a movable electrode | Toru Watanabe, Akira Sato, Takeshi Mori | 2013-03-12 |
| 8362577 | Resonator including a microelectromechanical system structure with first and second structures of silicon layers | Akira Sato, Toru Watanabe, Takeshi Mori | 2013-01-29 |
| 8305152 | MEMS oscillator and method of manufacturing thereof | Toru Watanabe, Ryuji Kihara | 2012-11-06 |
| 8198957 | Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof | Akira Sato | 2012-06-12 |
| 8129804 | Electronic device, resonator, oscillator and method for manufacturing electronic device | Akira Sato | 2012-03-06 |
| 8115266 | MEMS device having a movable electrode | Toru Watanabe, Akira Sato, Takeshi Mori | 2012-02-14 |
| 8063721 | Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof | Akira Sato | 2011-11-22 |
| 8026120 | Method of manufacturing MEMS device | Ryuji Kihara | 2011-09-27 |
| 8018302 | Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof | Akira Sato | 2011-09-13 |
| 7994594 | Electronic device, resonator, oscillator and method for manufacturing electronic device | Akira Sato | 2011-08-09 |