Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7989905 | MEMS device having a movable electrode | Toru Watanabe, Akira Sato, Takeshi Mori | 2011-08-02 |
| 7956709 | MEMS switch and manufacturing method thereof | Toru Watanabe, Akira Sato, Takeshi Mori | 2011-06-07 |
| 7892875 | MEMS resonator and manufacturing method of the same | Akira Sato, Toru Watanabe, Takeshi Mori | 2011-02-22 |
| 7884431 | MEMS device having a movable electrode | Toru Watanabe, Akira Sato, Takeshi Mori | 2011-02-08 |
| 7880245 | Electronic device and method for manufacturing thereof | Akira Sato, Toru Watanabe, Takeshi Mori | 2011-02-01 |
| 7838952 | MEMS device and fabrication method thereof | Akira Sato, Toru Watanabe, Takeshi Mori | 2010-11-23 |
| 7709912 | Electronic device and method for manufacturing thereof | Akira Sato, Toru Watanabe, Takeshi Mori | 2010-05-04 |
| 7696587 | MEMS device having a movable electrode | Toru Watanabe, Akira Sato, Takeshi Mori | 2010-04-13 |
| 7671430 | MEMS resonator and manufacturing method of the same | Akira Sato, Toru Watanabe, Takeshi Mori | 2010-03-02 |
| 7656252 | Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof | Akira Sato | 2010-02-02 |
| 6897481 | Semiconductor devices and manufacturing methods thereof | — | 2005-05-24 |
| 6479342 | Semiconductor devices and manufacturing methods thereof | — | 2002-11-12 |