Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12216406 | Coating method and coating apparatus | Yusaku Hashimoto, Kosuke Yoshihara | 2025-02-04 |
| 11938511 | Coating method, coating apparatus and recording medium | Yusaku Hashimoto, Kosuke Yoshihara | 2024-03-26 |
| 11773492 | Substrate processing apparatus, substrate processing method, and storage medium | Shogo Inaba | 2023-10-03 |
| 11676844 | Coating film forming apparatus and adjustment method therefor | Akiko Kiyotomi | 2023-06-13 |
| 11407005 | Coating method, coating apparatus and recording medium | Yusaku Hashimoto, Kosuke Yoshihara | 2022-08-09 |