Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12314023 | Treatment condition setting method, storage medium, and substrate treatment system | Takuya Mori, Tadashi Nishiyama, Hiroshi Tomita | 2025-05-27 |
| 11823922 | Substrate inspection apparatus, substrate processing apparatus, substrate inspection method, and computer-readable recording medium | Masato Hosaka, Tadashi Nishiyama, Kazuya Hisano | 2023-11-21 |
| 11726438 | Treatment condition setting method, storage medium, and substrate treatment system | Takuya Mori, Tadashi Nishiyama, Hiroshi Tomita | 2023-08-15 |
| 11676844 | Coating film forming apparatus and adjustment method therefor | Masatoshi Kawakita | 2023-06-13 |
| 11669955 | Substrate defect inspection method, storage medium, and substrate defect inspection apparatus | Shin-ichi Inoue, Kazuya Hisano, Tadashi Nishiyama | 2023-06-06 |
| 11609502 | Substrate inspection apparatus, substrate processing apparatus, substrate inspection method, and computer-readable recording medium | Masato Hosaka, Tadashi Nishiyama, Kazuya Hisano | 2023-03-21 |
| 11467496 | Substrate processing apparatus, method of adjusting parameters of coating module, and storage medium | — | 2022-10-11 |
| 11378388 | Substrate inspection method, substrate inspection apparatus and recording medium | Kazuya Hisano, Yasuaki Noda, Keisuke Hamamoto, Tadashi Nishiyama | 2022-07-05 |
| 11268912 | Substrate inspection method and substrate inspection apparatus | Kazuya Hisano | 2022-03-08 |
| 10901318 | Substrate processing apparatus, method of adjusting parameters of coating module, and storage medium | — | 2021-01-26 |
| 10670966 | Substrate processing apparatus, method of adjusting parameters of coating module, and storage medium | — | 2020-06-02 |
| 9308542 | Treatment solution supply apparatus, treatment solution supply method, and computer storage medium | — | 2016-04-12 |