Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12179564 | Sealing cover and sealing member | Fumito Okino | 2024-12-31 |
| 11378388 | Substrate inspection method, substrate inspection apparatus and recording medium | Kazuya Hisano, Akiko Kiyotomi, Yasuaki Noda, Tadashi Nishiyama | 2022-07-05 |
| 10707109 | Substrate processing apparatus | Satoshi Morita, Ryoji Ikebe, Yasuaki Noda, Norihisa Koga, Masato Hosaka | 2020-07-07 |