Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11832026 | Substrate imaging apparatus | Norihisa Koga, Tadashi Nishiyama | 2023-11-28 |
| 11791162 | Processing apparatus for forming a coating film on a substrate having a camera and a mirror member | Tadashi Nishiyama | 2023-10-17 |
| 11555691 | Substrate inspection system, substrate inspection method and recording medium | Hiroshi Nakamura, Toyohisa Tsuruda | 2023-01-17 |
| 11378388 | Substrate inspection method, substrate inspection apparatus and recording medium | Kazuya Hisano, Akiko Kiyotomi, Keisuke Hamamoto, Tadashi Nishiyama | 2022-07-05 |
| 10958879 | Substrate imaging apparatus | Norihisa Koga, Tadashi Nishiyama | 2021-03-23 |
| 10707109 | Substrate processing apparatus | Satoshi Morita, Ryoji Ikebe, Norihisa Koga, Keisuke Hamamoto, Masato Hosaka | 2020-07-07 |
| 10523905 | Substrate imaging apparatus | Norihisa Koga, Tadashi Nishiyama | 2019-12-31 |
| 10381221 | Substrate processing method, substrate processing apparatus and a computer-readable storage medium | Tadashi Nishiyama | 2019-08-13 |
| 8356951 | Wet-processing apparatus | Akira Fukutomi, Takafumi Hayama | 2013-01-22 |