Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12300524 | Substrate processing system | Yoshifumi Amano, Satoshi Morita, Isamu Miyamoto | 2025-05-13 |
| 11018035 | Substrate processing system | Yoshifumi Amano, Satoshi Morita, Isamu Miyamoto | 2021-05-25 |
| 11011436 | Substrate processing apparatus, control method of substrate processing apparatus and substrate processing system | Yoshifumi Amano, Satoshi Morita, Isamu Miyamoto | 2021-05-18 |
| 10713772 | Measurement processing device, substrate processing system, measurement jig, measurement processing method, and storage medium | Yoshifumi Amano, Yuki Ito, Eiichiro Okamoto, Kazuya Iwanaga | 2020-07-14 |
| 10707109 | Substrate processing apparatus | Satoshi Morita, Yasuaki Noda, Norihisa Koga, Keisuke Hamamoto, Masato Hosaka | 2020-07-07 |
| 10217628 | Substrate processing apparatus and processing method of substrate processing apparatus | Yoshifumi Amano, Satoshi Morita, Isamu Miyamoto | 2019-02-26 |
| 10128137 | Management method of substrate processing apparatus and substrate processing system | Yoshifumi Amano, Satoshi Morita, Isamu Miyamoto | 2018-11-13 |