Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469116 | Substrate processing apparatus and substrate processing method | Shoichiro Hidaka, Boui Ikeda, Eiichi Sekimoto, Masato Hayashi | 2022-10-11 |
| 10713772 | Measurement processing device, substrate processing system, measurement jig, measurement processing method, and storage medium | Yoshifumi Amano, Yuki Ito, Eiichiro Okamoto, Ryoji Ikebe | 2020-07-14 |