Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12230540 | Substrate processing system and substrate processing method | Yoshihiro Kawaguchi, Hirotoshi Mori | 2025-02-18 |
| 12191168 | Laser processing device, laser processing system and laser processing method | Hirotoshi Mori, Yoshihiro Kawaguchi, Hayato TANOUE | 2025-01-07 |
| 12087588 | Substrate processing apparatus and substrate processing method | Hirotoshi Mori, Yoshihiro Kawaguchi, Hayato TANOUE | 2024-09-10 |
| 11823922 | Substrate inspection apparatus, substrate processing apparatus, substrate inspection method, and computer-readable recording medium | Akiko Kiyotomi, Masato Hosaka, Tadashi Nishiyama | 2023-11-21 |
| 11669955 | Substrate defect inspection method, storage medium, and substrate defect inspection apparatus | Shin-ichi Inoue, Akiko Kiyotomi, Tadashi Nishiyama | 2023-06-06 |
| 11609502 | Substrate inspection apparatus, substrate processing apparatus, substrate inspection method, and computer-readable recording medium | Akiko Kiyotomi, Masato Hosaka, Tadashi Nishiyama | 2023-03-21 |
| 11378388 | Substrate inspection method, substrate inspection apparatus and recording medium | Akiko Kiyotomi, Yasuaki Noda, Keisuke Hamamoto, Tadashi Nishiyama | 2022-07-05 |
| 11268912 | Substrate inspection method and substrate inspection apparatus | Akiko Kiyotomi | 2022-03-08 |
| 9025852 | Substrate inspection apparatus and method for operating the same | Hiroshi Tomita, Norihisa Koga, Tadashi Nishiyama, Makoto Hayakawa | 2015-05-05 |
| 8855402 | Image creation method, substrate inspection method, non-transitory recording medium having program recorded thereon for executing image creation method or substrate inspection method, and substrate inspection apparatus | Hiroshi Tomita, Tadashi Nishiyama | 2014-10-07 |
| 8212869 | Substrate inspection method, substrate inspection system and storage medium | Shuji Iwanaga | 2012-07-03 |
| 8040500 | Defect inspection method and computer-readable storage medium | Hiroshi Tomita, Tadashi Nishiyama | 2011-10-18 |