HT

Hayato TANOUE

TL Tokyo Electron Limited: 17 patents #362 of 5,567Top 7%
Overall (All Time): #261,212 of 4,157,543Top 7%
17
Patents All Time

Issued Patents All Time

Showing 1–17 of 17 patents

Patent #TitleCo-InventorsDate
12397375 Processing apparatus and processing method Hirotoshi Mori, Yohei Yamashita 2025-08-26
12377497 Substrate processing apparatus and substrate processing method Hirotoshi Mori, Yoshihiro Kawaguchi 2025-08-05
12381085 Bonded substrate peripheral laser processing method and substrate processing apparatus thereof Yohei Yamashita, Yasutaka MIZOMOTO 2025-08-05
12327768 Substrate processing system and substrate processing method 2025-06-10
12322656 Substrate laser processing method and substrate laser processing apparatus Yohei Yamashita, Yasutaka MIZOMOTO 2025-06-03
12300495 Processing apparatus and processing method Yohei Yamashita 2025-05-13
12255063 Substrate processing system and substrate processing method Takashi Uno, Satoshi Ookawa, Suguru Enokida 2025-03-18
12191149 Substrate processing method and substrate processing system Yohei Yamashita 2025-01-07
12191168 Laser processing device, laser processing system and laser processing method Hirotoshi Mori, Yoshihiro Kawaguchi, Kazuya Hisano 2025-01-07
12142483 Substrate processing apparatus and substrate processing method Yoshihiro Kawaguchi, Seiji Nakano, Munehisa KODAMA, Hirotoshi Mori, Yohei YAMAWAKI 2024-11-12
12087588 Substrate processing apparatus and substrate processing method Hirotoshi Mori, Yoshihiro Kawaguchi, Kazuya Hisano 2024-09-10
12076820 Substrate processing apparatus and substrate processing method Hirotoshi Mori 2024-09-03
12070820 Processing apparatus and processing method Yohei Yamashita, Hirotoshi Mori 2024-08-27
11969827 Processing apparatus and processing method Yohei Yamashita, Yohei YAMAWAKI, Hirotoshi Mori 2024-04-30
11752576 Substrate processing system for removing peripheral portion of substrate, substrate processing method and computer readable recording medium thereof 2023-09-12
11450578 Substrate processing system and substrate processing method 2022-09-20
11450523 Substrate processing system with eccentricity detection device and substrate processing method 2022-09-20