Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12191153 | Substrate processing apparatus, substrate processing system and substrate processing method | Tomohiro Kaneko | 2025-01-07 |
| 12142483 | Substrate processing apparatus and substrate processing method | Yoshihiro Kawaguchi, Seiji Nakano, Hirotoshi Mori, Hayato TANOUE, Yohei YAMAWAKI | 2024-11-12 |
| 11929268 | Substrate processing system, substrate processing method and computer-readable recording medium | — | 2024-03-12 |
| 11858092 | Substrate processing system, substrate processing method and computer-readable recording medium | Takahiro Sakamoto | 2024-01-02 |
| 11817337 | Substrate processing system and substrate processing method | — | 2023-11-14 |
| 11417543 | Bonding apparatus and bonding method | Yoshitaka Otsuka, Yutaka Yamasaki | 2022-08-16 |
| 11120985 | Substrate transfer device, substrate processing system, substrate processing method and computer-readable recording medium | — | 2021-09-14 |
| 10833045 | Substrate processing apparatus and manufacturing method of substrate holding unit | Yoshitaka Otsuka, Takashi Terada | 2020-11-10 |