Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11342198 | Processing liquid supplying apparatus and processing liquid supplying method | Yuichi Terashita, Kousuke Yoshihara, Koji Takayanagi, Takashi Sasa | 2022-05-24 |
| 11099480 | Treatment solution supply apparatus and treatment solution supply method | Takahiro Ookubo, Suguru Enokida | 2021-08-24 |
| 10734251 | Liquid processing apparatus, liquid processing method, and storage medium for liquid process | Koji Takayanagi, Yukie Minekawa, Yuichi Yoshida, Kousuke Yoshihara, Yuichi Terashita +1 more | 2020-08-04 |
| 10268116 | Processing liquid supplying apparatus and method of supplying processing liquid | Kousuke Yoshihara, Koji Takayanagi, Takashi Sasa, Daisuke Ishimaru | 2019-04-23 |
| 10074546 | Processing liquid supplying apparatus and processing liquid supplying method | Yuichi Terashita, Kousuke Yoshihara, Koji Takayanagi, Takashi Sasa | 2018-09-11 |
| 10035173 | Chemical supply system, substrate treatment apparatus incorporating the same, and coating and developing system incorporating the same apparatus | Takahiro Ookubo, Kousuke Yoshihara, Yusuke Yamamoto, Steffen Hornig | 2018-07-31 |
| 10022652 | Solution treatment apparatus and solution treatment method | Kousuke Yoshihara, Katsunori Ichino, Takashi Sasa, Katsuhiro Tsuchiya, Yuichi Terashita +1 more | 2018-07-17 |
| 9975073 | Processing liquid supply method, processing liquid supply apparatus and storage medium | Yuichi Yoshida, Ryouichirou Naitou | 2018-05-22 |
| 9878267 | Solution treatment apparatus and solution treatment method | Kousuke Yoshihara, Katsunori Ichino, Takashi Sasa, Katsuhiro Tsuchiya, Yuichi Terashita +1 more | 2018-01-30 |
| 9846363 | Processing liquid supplying apparatus and method of supplying processing liquid | Kousuke Yoshihara, Koji Takayanagi, Takashi Sasa, Daisuke Ishimaru | 2017-12-19 |
| 9732910 | Processing-liquid supply apparatus and processing-liquid supply method | Koji Takayanagi, Kousuke Yoshihara, Yuichi Terashita, Takashi Sasa | 2017-08-15 |
| 9731226 | Solution treatment apparatus and solution treatment method | Kousuke Yoshihara, Katsunori Ichino, Takashi Sasa, Katsuhiro Tsuchiya, Yuichi Terashita +1 more | 2017-08-15 |
| 9372405 | Chemical liquid supply method and chemical liquid supply system | Takahiro Ookubo, Takashi Sasa, Tsuyoshi Nogami | 2016-06-21 |
| 9162163 | Processing liquid supply method, processing liquid supply apparatus and storage medium | Yuichi Yoshida, Ryouichirou Naitou | 2015-10-20 |
| 9086190 | Chemical supply system, substrate treatment apparatus incorporating the same, and coating and developing system incorporating the same apparatus | Takahiro Ookubo, Kousuke Yoshihara, Yusuke Yamamoto, Steffen Hornig | 2015-07-21 |
| 6848625 | Process liquid supply mechanism and process liquid supply method | Takashi Takekuma, Takeshi Ohto, Hiroyuki Miyamoto, Kousuke Yoshihara, Shinya Hori +1 more | 2005-02-01 |