Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10035173 | Chemical supply system, substrate treatment apparatus incorporating the same, and coating and developing system incorporating the same apparatus | Toshinobu Furusho, Takahiro Ookubo, Kousuke Yoshihara, Yusuke Yamamoto | 2018-07-31 |
| 9086190 | Chemical supply system, substrate treatment apparatus incorporating the same, and coating and developing system incorporating the same apparatus | Toshinobu Furusho, Takahiro Ookubo, Kousuke Yoshihara, Yusuke Yamamoto | 2015-07-21 |
| 6797029 | Process facility having at least two physical units each having a reduced density of contaminating particles with respect to the surroundings | Kay Lederer | 2004-09-28 |