Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7485188 | Coating process method and coating process apparatus | Yasuyuki Kometani, Yoshiteru Fukuda, Junya Minamida | 2009-02-03 |
| 6848625 | Process liquid supply mechanism and process liquid supply method | Toshinobu Furusho, Takeshi Ohto, Hiroyuki Miyamoto, Kousuke Yoshihara, Shinya Hori +1 more | 2005-02-01 |
| 6527861 | Developing apparatus with a porous film nozzle | — | 2003-03-04 |
| 6432199 | Apparatus and method for processing a substrate | — | 2002-08-13 |
| 6402400 | Substrate processing apparatus | Issei Ueda, Kenji Okumura | 2002-06-11 |
| 6377329 | Substrate processing apparatus | — | 2002-04-23 |
| 6284043 | Solution treatment apparatus | — | 2001-09-04 |
| 6258167 | Process liquid film forming apparatus | Yukihiro Kawano | 2001-07-10 |
| 6054181 | Method of substrate processing to form a film on multiple target objects | Mitsuhiro Nanbu, Naruaki Iida, Hideaki Gotou, Masanori Tateyama, Yuji Yoshimoto +6 more | 2000-04-25 |
| 5964954 | Double-sided substrate cleaning apparatus and cleaning method using the same | Hiroyuki Matsukawa, Akira Yonemizu, Michiaki Matsushita, Akihiro Fujimoto, Hidetami Yaegashi +1 more | 1999-10-12 |
| 5725664 | Semiconductor wafer processing apparatus including localized humidification between coating and heat treatment sections | Mitsuhiro Nanbu, Naruaki Iida, Hideaki Gotou, Masanori Tateyama, Yuji Yoshimoto +6 more | 1998-03-10 |
| 5686143 | Resist treating method | Hiroyuki Matsukawa, Akira Yonemizu, Michiaki Matsushita, Akihiro Fujimoto, Hidetami Yaegashi +1 more | 1997-11-11 |
| 5665200 | Substrate processing method and substrate processing apparatus | Akihiro Fujimoto, Kiyomi Sonobe | 1997-09-09 |
| 5580607 | Coating apparatus and method | Masaaki Murakami, Masatoshi Deguchi, Akihiro Fujimoto | 1996-12-03 |
| 5565034 | Apparatus for processing substrates having a film formed on a surface of the substrate | Mitsuhiro Nanbu, Naruaki Iida, Hideaki Gotou, Masanori Tateyama, Yuji Yoshimoto +6 more | 1996-10-15 |
| 5518542 | Double-sided substrate cleaning apparatus | Hiroyuki Matsukawa, Akira Yonemizu, Michiaki Matsushita, Akihiro Fujimoto, Hidetami Yaegashi +1 more | 1996-05-21 |
| 5416047 | Method for applying process solution to substrates | Nobuo Konishi, Hideyuki Takamori, Masami Akimoto, Kiyohisa Tateyama, Masaaki Murakami +1 more | 1995-05-16 |
| 5070813 | Coating apparatus | Hiroyuki Sakai, Eiichi Shirakawa, Chizo Yamaguchi | 1991-12-10 |