Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8372480 | Coater/developer, method of coating and developing resist film, and computer readable storing medium | Akira Miyata | 2013-02-12 |
| 8015940 | Coater/developer, method of coating and developing resist film, and computer readable storing medium | Akira Miyata | 2011-09-13 |
| 6834210 | Substrate processing system and substrate processing method | Akira Miyata | 2004-12-21 |
| 6526329 | Substrate processing system and substrate processing method | Syuzo Fujimaru | 2003-02-25 |
| 6507770 | Substrate processing system and substrate processing method | Kenichi Okubo, Jun Ookura | 2003-01-14 |
| 6457882 | Substrate processing method and substrate processing apparatus | Kunie Ogata, Ryouichi Uemura, Yoshiyuki Nakajima | 2002-10-01 |
| 6394670 | Parts maintenance managing system | Kunie Ogata, Takashi Aiuchi | 2002-05-28 |
| RE37470 | Substrate processing apparatus and substrate processing method | Jun Ohkura, Naruaki Iida, Hiroyuki Kudou, Yasuhiro Sakamoto | 2001-12-18 |
| 6054181 | Method of substrate processing to form a film on multiple target objects | Mitsuhiro Nanbu, Naruaki Iida, Hideaki Gotou, Yuji Yoshimoto, Tomoko Ishimoto +6 more | 2000-04-25 |
| 5725664 | Semiconductor wafer processing apparatus including localized humidification between coating and heat treatment sections | Mitsuhiro Nanbu, Naruaki Iida, Hideaki Gotou, Yuji Yoshimoto, Tomoko Ishimoto +6 more | 1998-03-10 |
| 5664254 | Substrate processing apparatus and substrate processing method | Jun Ohkura, Naruaki Iida, Hiroyuki Kudou, Yasuhiro Sakamoto | 1997-09-02 |
| 5565034 | Apparatus for processing substrates having a film formed on a surface of the substrate | Mitsuhiro Nanbu, Naruaki Iida, Hideaki Gotou, Yuji Yoshimoto, Tomoko Ishimoto +6 more | 1996-10-15 |
| 5061144 | Resist process apparatus | Masami Akimoto, Yoshio Kimura, Osamu Hirakawa, Noriyuki Anai, Yasuhiro Sakamoto | 1991-10-29 |