Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656281 | Substrate processing apparatus and substrate processing method | Issei Ueda | 2003-12-02 |
| RE37470 | Substrate processing apparatus and substrate processing method | Jun Ohkura, Naruaki Iida, Masanori Tateyama, Yasuhiro Sakamoto | 2001-12-18 |
| 6309116 | Substrate processing system | Koji Mahara, Issei Ueda, Hiroichi Inada | 2001-10-30 |
| 6096233 | Method for wet etching of thin film | Hiroki Taniyama, Miyako Yamasaka, Akira Yonemizu | 2000-08-01 |
| 5975097 | Processing apparatus for target processing substrate | Akira Yonemizu, Masami Akimoto | 1999-11-02 |
| 5737338 | ATM exchange and method of testing same | Nobuhiko Eguchi, Kazumasa Sonoda, Naoki Aihara | 1998-04-07 |
| 5711646 | Substrate transfer apparatus | Issei Ueda, Masami Akimoto | 1998-01-27 |
| 5664254 | Substrate processing apparatus and substrate processing method | Jun Ohkura, Naruaki Iida, Masanori Tateyama, Yasuhiro Sakamoto | 1997-09-02 |