Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8890460 | Servo control device | Hidetoshi Ikeda, Yoshihiro Marushita, Kiyoshi Hasegawa, Hidemasa Ogi | 2014-11-18 |
| 8749257 | Position detecting method for performing position alignment of transfer point of transfer arm | Toshiyuki Matsumoto, Tomohide Minami, Yuichi Douki | 2014-06-10 |
| 8149005 | Jig for detecting position | Toshiyuki Matsumoto, Tomohide Minami, Yuichi Douki | 2012-04-03 |
| 7994793 | Jig for detecting position | Toshiyuki Matsumoto, Tomohide Minami, Yuichi Douki | 2011-08-09 |
| 7884622 | Method of adjusting moving position of transfer arm and position detecting jig | Yuichi Doki, Tokutarou Hayashi | 2011-02-08 |
| 6309116 | Substrate processing system | Hiroyuki Kudou, Issei Ueda, Hiroichi Inada | 2001-10-30 |