Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12074048 | Substrate processing apparatus and substrate processing method | Hiroki Harada, Tatsuhiko Tsujihashi, Tsuyoshi OTSUKA, Yuji Kawaguchi | 2024-08-27 |
| 10879100 | Substrate transfer device, substrate transfer method and recording medium | Hiroki Harada, Akihiro Teramoto, Tooru Tokimatu, Masahiro Abe, Kazutoshi Ishimaru | 2020-12-29 |
| 10256127 | Substrate transfer apparatus, substrate transfer method, and non-transitory storage medium | Yuichi Douki, Hiromitsu Maejima | 2019-04-09 |
| 9507349 | Substrate transfer apparatus, substrate transfer method, and non-transitory storage medium | Yuichi Douki, Hiromitsu Maejima | 2016-11-29 |
| 9299599 | Thermal processing apparatus for thermal processing substrate and positioning method of positioning substrate transfer position | Yuichi Douki, Naruaki Iida, Suguru Enokida | 2016-03-29 |
| 9268327 | Substrate processing apparatus and substrate processing method | Akihiro Teramoto | 2016-02-23 |
| 9240337 | Substrate transport method, substrate transport apparatus, and coating and developing system | — | 2016-01-19 |
| 9136150 | Substrate processing apparatus, substrate processing method and non-transitory storage medium | Yuichi Douki, Hirotoshi Mori, Akihiro Teramoto | 2015-09-15 |
| 8781787 | Substrate carrying mechanism, substrate carrying method and recording medium storing program including set of instructions to be executed to accomplish the substrate carrying method | Kiminari Sakaguchi | 2014-07-15 |
| 8755935 | Substrate holder positioning method and substrate processing system | Yuichi Douki, Naruaki Iida, Suguru Enokida | 2014-06-17 |
| 8433436 | Substrate processing system, substrate placing position adjusting method and storage medium | Yuichi Doki | 2013-04-30 |
| 8055376 | Substrate processing system, substrate placing position adjusting method and storage medium | Yuichi Doki | 2011-11-08 |
| 7884622 | Method of adjusting moving position of transfer arm and position detecting jig | Yuichi Doki, Koji Mahara | 2011-02-08 |