Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12312184 | Substrate transfer device and substrate transfer method | Suguru Enokida, Kazuki Matsushita | 2025-05-27 |
| 12074048 | Substrate processing apparatus and substrate processing method | Hiroki Harada, Tokutarou Hayashi, Tsuyoshi OTSUKA, Yuji Kawaguchi | 2024-08-27 |
| D1012311 | Holding pad for carrying substrate | Suguru Enokida, Kazuki Matsushita | 2024-01-23 |
| D1011550 | Holding pad for carrying substrate | Suguru Enokida, Kazuki Matsushita | 2024-01-16 |
| 11476143 | Substrate processing apparatus and substrate receptacle storage method | Akihiro Teramoto, Kousei Ide | 2022-10-18 |