Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12174549 | Liquid amount measuring method and computer-readable recording medium | Yuichiro KUNUGIMOTO, Shota Ueyama, Yuta Nishiyama, Shinichi Hatakeyama | 2024-12-24 |
| 11868057 | Solution treatment apparatus and cleaning method | Kenta SHIBASAKI, Hiroichi Inada, Satoshi Shimmura, Koji Takayanagi, Kenji Yada +1 more | 2024-01-09 |
| 11726409 | Substrate processing system, liquid amount measuring method, computer-readable recording medium, and measuring jig | Yuichiro KUNUGIMOTO, Shota Ueyama, Yuta Nishiyama, Shinichi Hatakeyama | 2023-08-15 |
| 11476143 | Substrate processing apparatus and substrate receptacle storage method | Tatsuhiko Tsujihashi, Kousei Ide | 2022-10-18 |
| 11211278 | Substrate processing apparatus and substrate processing method | Suguru Enokida, Masashi Tsuchiyama, Keisuke Sasaki | 2021-12-28 |
| D922609 | Holding pad for substrate transfer | Toru Tokimatu | 2021-06-15 |
| D909603 | Holding pad for substrate transfer | Toru Tokimatu | 2021-02-02 |
| 10879100 | Substrate transfer device, substrate transfer method and recording medium | Tokutarou Hayashi, Hiroki Harada, Tooru Tokimatu, Masahiro Abe, Kazutoshi Ishimaru | 2020-12-29 |
| 9268327 | Substrate processing apparatus and substrate processing method | Tokutarou Hayashi | 2016-02-23 |
| 9214370 | Substrate transfer device, substrate transfer method, and storage medium | Naruaki Iida | 2015-12-15 |
| 9136150 | Substrate processing apparatus, substrate processing method and non-transitory storage medium | Tokutarou Hayashi, Yuichi Douki, Hirotoshi Mori | 2015-09-15 |
| D666979 | Substrate holder | Norifumi Sato | 2012-09-11 |
| 8043039 | Substrate treatment apparatus | Yuichi Yamamoto, Wataru Tsukinoki | 2011-10-25 |
| 7554428 | Boundary acoustic wave device comprising Ni diffused in Au and method for manufacturing the same | Daisuke Yamamoto, Hajime Kando, Toshiyuki Fuyutsume, Masahiko Saeki | 2009-06-30 |