Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12391472 | Substrate processing apparatus and substrate processing method | Tsuyoshi Watanabe, Naruaki Iida, Suguru Enokida, Kousei Ide | 2025-08-19 |
| 12198961 | Substrate processing apparatus and substrate processing method | Tsuyoshi Watanabe, Suguru Enokida, Taro Yamamoto | 2025-01-14 |
| 11971661 | Substrate processing apparatus and substrate processing method | Yoji Sakata, Tsuyoshi Watanabe | 2024-04-30 |
| 11869789 | Substrate processing apparatus and substrate processing method | Tsuyoshi Watanabe, Suguru Enokida, Taro Yamamoto | 2024-01-09 |
| 11664254 | Substrate processing apparatus and substrate processing method | Tsuyoshi Watanabe, Suguru Enokida, Taro Yamamoto | 2023-05-30 |
| 11211278 | Substrate processing apparatus and substrate processing method | Akihiro Teramoto, Suguru Enokida, Keisuke Sasaki | 2021-12-28 |
| 11199785 | Coating and developing apparatus and coating and developing method | Tsuyoshi Watanabe, Hiroki Sato, Ippei Hamada | 2021-12-14 |
| 11079691 | Coating and developing apparatus and coating and developing method | Tsuyoshi Watanabe, Hiroki Sato, Ippei Hamada | 2021-08-03 |
| 10838311 | Coating and developing apparatus and coating and developing method | Keigo Nakano, Koji Takayanagi | 2020-11-17 |
| D690330 | Coating and developing apparatus | Tsunenaga Nakashima, Shinichi Hayashi | 2013-09-24 |