Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11971661 | Substrate processing apparatus and substrate processing method | Masashi Tsuchiyama, Tsuyoshi Watanabe | 2024-04-30 |
| 9984904 | Substrate treatment system, substrate transfer method and computer storage medium | Masahiro Nakaharada, Akira Miyata, Shinichi Hayashi, Suguru Enokida, Tsunenaga Nakashima | 2018-05-29 |
| 9984905 | Substrate treatment system, substrate transfer method and computer storage medium | Masahiro Nakaharada, Akira Miyata, Shinichi Hayashi, Suguru Enokida, Tsunenaga Nakashima | 2018-05-29 |
| 9460942 | Substrate treatment system, substrate transfer method and computer storage medium | Masahiro Nakaharada, Akira Miyata, Shinichi Hayashi, Suguru Enokida, Tsunenaga Nakashima | 2016-10-04 |
| 9287145 | Substrate treatment system, substrate transfer method, and a non-transitory computer storage medium | Masahiro Nakaharada, Akira Miyata, Shinichi Hayashi, Suguru Enokida, Tsunenaga Nakashima | 2016-03-15 |