Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12391472 | Substrate processing apparatus and substrate processing method | Tsuyoshi Watanabe, Masashi Tsuchiyama, Naruaki Iida, Suguru Enokida | 2025-08-19 |
| 12381102 | Substrate processing apparatus and substrate processing method | Naruaki Iida, Kazuya Matsushita | 2025-08-05 |
| 12368069 | Substrate transfer device including housing provided with fan | Naruaki Iida | 2025-07-22 |
| 11978655 | Substrate transfer mechanism and substrate transferring method | Naruaki Iida | 2024-05-07 |
| 11705359 | Substrate transfer mechanism and substrate transferring method | Naruaki Iida | 2023-07-18 |
| 11476143 | Substrate processing apparatus and substrate receptacle storage method | Akihiro Teramoto, Tatsuhiko Tsujihashi | 2022-10-18 |