Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12174549 | Liquid amount measuring method and computer-readable recording medium | Yuichiro KUNUGIMOTO, Shota Ueyama, Akihiro Teramoto, Shinichi Hatakeyama | 2024-12-24 |
| 11726409 | Substrate processing system, liquid amount measuring method, computer-readable recording medium, and measuring jig | Yuichiro KUNUGIMOTO, Shota Ueyama, Akihiro Teramoto, Shinichi Hatakeyama | 2023-08-15 |
| 11161136 | Liquid processing apparatus and liquid processing method | Tomoki Okazawa, Takeshi Tobimatsu | 2021-11-02 |