Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12244972 | Substrate processing monitoring apparatus based on imaging video data, substrate processing apparatus, substrate processing monitoring method, and storage medium | Keishi Hamada, Takafumi Hayama, Motoi Okada, Shoki HAMAGUCHI | 2025-03-04 |
| 12174549 | Liquid amount measuring method and computer-readable recording medium | Shota Ueyama, Akihiro Teramoto, Yuta Nishiyama, Shinichi Hatakeyama | 2024-12-24 |
| 12057327 | Substrate processing apparatus and substrate processing method | Masataka Gosho, Yuichi Douki, Satoshi Biwa, Satoshi Okamura, Katsuhiro Ookawa | 2024-08-06 |
| 11914298 | Liquid processing apparatus and method of detecting liquid in liquid processing apparatus | Takafumi Hayama, Hidehiro Suzuki | 2024-02-27 |
| 11726409 | Substrate processing system, liquid amount measuring method, computer-readable recording medium, and measuring jig | Shota Ueyama, Akihiro Teramoto, Yuta Nishiyama, Shinichi Hatakeyama | 2023-08-15 |
| 11637031 | Systems and methods for spin process video analysis during substrate processing | Michael A. Carcasi, Joshua Hooge, Mark H. Somervell, Hiroyuki Iwaki, Masahide Tadokoro +2 more | 2023-04-25 |
| 10248030 | Process recipe evaluation method, storage medium, assisting device for process recipe evaluation, and liquid processing apparatus | Toyohisa Tsuruda, Takafumi Hayama, Keishi Hamada | 2019-04-02 |
| 9766543 | Liquid treatment method, substrate processing apparatus and non-transitory storage medium | Izumi Hasegawa | 2017-09-19 |