Issued Patents All Time
Showing 1–25 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424467 | Systems and methods for determining a localized fluid velocity on a spinning substrate by tracking movement of a tracer across the spinning substrate | Sean Berglund, Ankur Agarwal, Steven Gueci | 2025-09-23 |
| 12226796 | Bath systems and methods thereof | Ihsan Simms, Joel Estrella, Antonio Luis Pacheco Rotondaro, Joshua Hooge, Hiroshi Marumoto | 2025-02-18 |
| 12165870 | Chemical amplification methods and techniques for developable bottom anti-reflective coatings and dyed implant resists | Steven Scheer, Benjamen M. Rathsack, Mark H. Somervell, Joshua Hooge | 2024-12-10 |
| 12123778 | Thermal imaging sensor for integration into track system | Kazuhiro Shiba, Masahide Tadokoro, Masashi Enomoto, Toyohisa Tsuruda | 2024-10-22 |
| 11998945 | Methods and systems to monitor, control, and synchronize dispense systems | Joshua Hooge, Mark H. Somervell | 2024-06-04 |
| 11738363 | Bath systems and methods thereof | Ihsan Simms, Joel Estrella, Antonio Luis Pacheco Rotondaro, Joshua Hooge, Hiroshi Marumoto | 2023-08-29 |
| 11703459 | System and method to calibrate a plurality of wafer inspection system (WIS) modules | Hiroyuki Iwaki, Toyohisa Tsuruda, Masahide Tadokoro | 2023-07-18 |
| 11637031 | Systems and methods for spin process video analysis during substrate processing | Joshua Hooge, Mark H. Somervell, Hiroyuki Iwaki, Masahide Tadokoro, Masashi Enomoto +2 more | 2023-04-25 |
| 11624607 | Hardware improvements and methods for the analysis of a spinning reflective substrates | Joshua Hooge | 2023-04-11 |
| 11474028 | Systems and methods for monitoring one or more characteristics of a substrate | Mark H. Somervell, Joshua Hooge, Masahide Tadokoro | 2022-10-18 |
| 11339733 | Systems and methods to monitor particulate accumulation for bake chamber cleaning | Mark H. Somervell | 2022-05-24 |
| 11276157 | Systems and methods for automated video analysis detection techniques for substrate process | Joel Estrella, Joshua Hooge | 2022-03-15 |
| 11262657 | System and method of planarization control using a cross-linkable material | Ryan L. Burns, Mark H. Somervell | 2022-03-01 |
| 11168978 | Hardware improvements and methods for the analysis of a spinning reflective substrates | Joshua Hooge | 2021-11-09 |
| 11163236 | Method and process for stochastic driven detectivity healing | Seiji Nagahara, Congque DINH, Mark H. Somervell | 2021-11-02 |
| 11061332 | Methods for sensitizing photoresist using flood exposures | Mark H. Somervell, Seiji Nagahara | 2021-07-13 |
| 10809620 | Systems and methods for developer drain line monitoring | Mark H. Somervell, Joshua Hooge | 2020-10-20 |
| 10551743 | Critical dimension control by use of photo-sensitized chemicals or photo-sensitized chemically amplified resist | Anton J. deVilliers | 2020-02-04 |
| 10534266 | Methods and techniques to use with photosensitized chemically amplified resist chemicals and processes | Joshua Hooge, Benjamen M. Rathsack, Seiji Nagahara | 2020-01-14 |
| 10522428 | Critical dimension control by use of a photo agent | Anton J. deVilliers | 2019-12-31 |
| 10429745 | Photo-sensitized chemically amplified resist (PS-CAR) simulation | Benjamen M. Rathsack, Mark H. Somervell, Wallace P. Printz, Seiji Nagahara, Seiichi Tagawa | 2019-10-01 |
| 10096528 | Critical dimension control by use of a photo agent | Anton J. deVilliers | 2018-10-09 |
| 10048594 | Photo-sensitized chemically amplified resist (PS-CAR) model calibration | Mark H. Somervell, Carlos A. Fonseca | 2018-08-14 |
| 10048587 | Method and apparatus for increased recirculation and filtration in a photoresist dispense system using a liquid empty reservoir | Wallace P. Printz, Joshua Hooge | 2018-08-14 |
| 10020195 | Chemical amplification methods and techniques for developable bottom anti-reflective coatings and dyed implant resists | Steven Scheer, Benjamen M. Rathsack, Mark H. Somervell, Joshua Hooge | 2018-07-10 |