Issued Patents All Time
Showing 26–43 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9978618 | Hot plate with programmable array of lift devices for multi-bake process optimization | Mark H. Somervell, Josh Hooge | 2018-05-22 |
| 9786523 | Method and apparatus for substrate rinsing and drying | Carlos A. Fonseca | 2017-10-10 |
| 9746774 | Mitigation of EUV shot noise replicating into acid shot noise in photo-sensitized chemically-amplified resist (PS-CAR) | Mark H. Somervell | 2017-08-29 |
| 9618848 | Methods and techniques to use with photosensitized chemically amplified resist chemicals and processes | Joshua Hooge, Benjamen M. Rathsack, Seiji Nagahara | 2017-04-11 |
| 9613801 | Integration of absorption based heating bake methods into a photolithography track system | Mark H. Somervell, Benjamen M. Rathsack | 2017-04-04 |
| 9612534 | Exposure dose homogenization through rotation, translation, and variable processing conditions | Mark Schattenburg, Rudolf H. Hendel | 2017-04-04 |
| 9519227 | Metrology for measurement of photosensitizer concentration within photo-sensitized chemically-amplified resist (PS-CAR) | Mark H. Somervell, Joshua Hooge, Benjamen M. Rathsack, Seiji Nagahara | 2016-12-13 |
| 9383138 | Methods and heat treatment apparatus for uniformly heating a substrate during a bake process | Steven Scheer | 2016-07-05 |
| 9085045 | Method and system for controlling a spike anneal process | Steven Scheer | 2015-07-21 |
| 8980538 | Chemi-epitaxy in directed self-assembly applications using photo-decomposable agents | Mark H. Somervell | 2015-03-17 |
| 8474468 | Apparatus and method for thermally processing a substrate with a heated liquid | — | 2013-07-02 |
| 8435728 | Method of slimming radiation-sensitive material lines in lithographic applications | Benjamin M. Rathsack, Mark H. Somervell | 2013-05-07 |
| 8338086 | Method of slimming radiation-sensitive material lines in lithographic applications | Benjamin M. Rathsack, Mark H. Somervell | 2012-12-25 |
| 8178820 | Method and heat treatment apparatus for uniformly heating a substrate during a bake process | — | 2012-05-15 |
| 8024676 | Multi-pitch scatterometry targets | David Dixon | 2011-09-20 |
| 7671412 | Method and device for controlling temperature of a substrate using an internal temperature control device | Michael Philip Kincaid | 2010-03-02 |
| 7479463 | Method for heating a chemically amplified resist layer carried on a rotating substrate | John Kulp, Merritt Funk | 2009-01-20 |
| 7435692 | Gas jet reduction of iso-dense field thickness bias for gapfill process | — | 2008-10-14 |