MS

Mark Schattenburg

MIT: 8 patents #519 of 9,367Top 6%
TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
IBM: 1 patents #44,794 of 70,183Top 65%
📍 Framingham, MA: #127 of 1,271 inventorsTop 10%
🗺 Massachusetts: #9,595 of 88,656 inventorsTop 15%
Overall (All Time): #366,994 of 4,157,543Top 9%
13
Patents All Time

Issued Patents All Time

Showing 1–13 of 13 patents

Patent #TitleCo-InventorsDate
11879170 Stress patterning systems and methods for manufacturing free-form deformations in thin substrates Youwei Yao, Brandon Chalifoux 2024-01-23
10503083 Apparatus and method for using scanning light beam for film or surface modification Rudolf H. Hendel, John Glenn 2019-12-10
10145672 Detection of position, orientation and scale of work pieces using retroreflective surfaces Rudolf H. Hendel, Paul Glenn, John Glenn 2018-12-04
10108096 Apparatus and method for using scanning light beam for film or surface modification Rudolf H. Hendel, John Glenn 2018-10-23
9612534 Exposure dose homogenization through rotation, translation, and variable processing conditions Rudolf H. Hendel, Michael A. Carcasi 2017-04-04
8025832 Method for shaping sheet thermoplastic and the like Mireille Akilian 2011-09-27
7492989 Hybrid transmission-reflection grating Ralf Heilmann 2009-02-17
6882477 Method and system for interference lithography utilizing phase-locked scanning beams Patrick N. Everett 2005-04-19
6822248 Spatial phase locking with shaped electron beam lithography Juan Ferrera, James G. Goodberlet, Timothy R. Groves, John G. Hartley, Mark K. Mondol +1 more 2004-11-23
5809103 X-ray lithography masking Henry I. Smith, Michael H. Lim, James Thomas Carter 1998-09-15
5142385 Holographic lithography Erik H. Anderson, Henry I. Smith 1992-08-25
5136169 Energy beam locating Henry I. Smith, Erik H. Anderson 1992-08-04
4890309 Lithography mask with a .pi.-phase shifting attenuator Henry I. Smith, Erik H. Anderson 1989-12-26