Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6882477 | Method and system for interference lithography utilizing phase-locked scanning beams | Mark Schattenburg | 2005-04-19 |
| 6522411 | Optical gap measuring apparatus and method having two-dimensional grating mark with chirp in one direction | Euclid E. Moon, Henry I. Smith | 2003-02-18 |
| 6088103 | Optical interference alignment and gapping apparatus | Euclid E. Moon, Henry I. Smith | 2000-07-11 |
| 5808742 | Optical alignment apparatus having multiple parallel alignment marks | Euclid E. Moon, Henry I. Smith | 1998-09-15 |
| 5298988 | Technique for aligning features on opposite surfaces of a substrate | William Delaney | 1994-03-29 |
| 5260558 | Measurements using balanced illumination optical microscopy | William Goltsos, Robert E. Knowlden | 1993-11-09 |
| 5160959 | Device and method for the alignment of masks | William Delaney, Marsden P. Griswold | 1992-11-03 |
| 4375684 | Laser mode locking, Q-switching and dumping system | — | 1983-03-01 |
| 4314210 | Mode-locking and chirping system for lasers | — | 1982-02-02 |